Accurate electric field measurement plays a crucial role in various fields, including weather forecasting, industrial process control, and the safety of workers handling high-voltage cables. However, achieving precise measurements remains a technical challenge. A breakthrough has now been made by a research team from the Technical University of Vienna (TU Wien), who have developed a silicon-based MEMS electric field sensor that overcomes many of the limitations of traditional devices. This innovation was achieved in collaboration with the Institute of Integrated Sensor Systems at Danube University Krems and was recently published in *Nature Electronics*. The key advantage of this new sensor is that it does not interfere with the electric field being measured, making it more accurate and reliable.
Current electric field measurement devices often suffer from significant drawbacks. According to Andreas Kainz from TU Wien's Sensor and Actuator Systems Institute, these devices typically contain conductive metal parts that can distort the very field they are meant to measure. If grounding is required for reference, the interference becomes even more pronounced. As a result, existing systems are often inefficient and difficult to transport. In contrast, the MEMS sensor developed by TU Wien uses a simple yet effective design based on silicon. It consists of a tiny spring connected to a micromesh-like structure that measures minute movements. When placed in an electric field, the silicon structure experiences a force that causes the spring to expand or compress slightly.
The sensor operates through a clever optical mechanism. A mass is suspended on an elastic element within a conductive frame. When exposed to an electric field, electrostatic forces cause the mass to move, and this displacement is measured using optical techniques. An LED emits light that passes through a grid-like silicon structure. The movement of the mass alters the gap between the upper and lower layers, allowing light to reach a photodetector below. By analyzing the amount of light detected, the strength of the electric field can be accurately determined. This method ensures high sensitivity and precision, especially for low-frequency fields up to 1 kHz.
The prototype device has already demonstrated impressive accuracy. While it currently cannot determine the direction of the electric field, it can precisely measure its intensity. It is capable of detecting weak electric fields as low as 200 volts per meter with high reliability. "Our system is already comparable to existing solutions, but our sensors are smaller and simpler," says Kainz. He adds that the technology has great potential for future improvements. Unlike other mature measurement methods, this MEMS-based approach is still in its early stages, offering exciting possibilities for further development and application in real-world scenarios.
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