MIM unit structure
MIM is a sandwich structure composed of three layers of metal, insulator and metal. The MIM structure used for liquid crystal display is shown in Figure 1, there are two main types: (1) Figure 1 (a) is a relatively common "T" shaped structure. The technological process of this structure is relatively simple, and the MIM developed in the early stage is basically in this form. However, the MIM area of ​​this structure is relatively large and has a large parasitic capacitance, which is detrimental to improving contrast and improving its display quality. If you want to reduce its area, you need a large area,
High-resolution lithography equipment. Not only does it increase the difficulty of the manufacturing process, the yield decreases, but it also increases the cost, and it is not suitable for large-scale display. (2) Figure 1 (b) shows the developed lateral MIM structure, which is formed laterally on the scan line
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